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광학시스템

점광원(Short Arc Lamp)를 이용한 노광

RTR 양면 동시 UV Exposure System

Model : Exposure Area, UV Lamp, Wave Length, Resolution, UV Intensity, UV Uniformity, Collimation Half Angle, Declination Angle, Lamp Life time, Dimension, Weight, Alignment Accuracy, Alignment Method, Mask Contact, Control
Power Supply

UVB(313nm) & UVA(365nm) 광배향 편광 평행 UV 노광기

model : Exposure Area, UV Lamp, Wave Length, UV Intensity, UV Uniformity, Collimation Half Angle, Declination Angle, Lamp Life time, Dimension, Weight, Polarizer偏光子, Optics, Mask Contact, Control, Power Supply

수동 평행 UV Exposure(노광) System

소형 평행 UV노광用 (Mask Aligner) System

Model : Exposure Area, Super High, Pressure Mercury Lamp, Wave Length, Resolution, Intensity, Intensity Uniformity, Collimation Half Angle, Declination Angle, Lamp Life time, Dimension[W ×D ×H], Weight, Alignment, Alignment Accuracy, Alignment Method, Mask Contact, Control, Power Supply

평행광 UV Scan 노광 시스템

Model : Beam Area, Scan Exposure Area, UV Lamp, Wave Length, Scan peed(Max), Resolution, UV Intensity, UV Uniformity, Collimation Half Angle, Declination Angle, Lamp Life time, Dimension, Weight, Alignment Accuracy, Alignment Method, Mask Contact, Control, Power Supply

UV Edge Exposure

Model : Exposure Area, UV Lamp, Wave Length, UV Uniformity, UV Intensity, Cold Mirror, LENS Type, Lamp Life time, Lamp House, Dimension, Weight, Dimming Wheel, 광량 제어, Control, Power Supply

Image노광用 광원장치(DMD Source광원用)

Model : Exposure Area, UV Lamp, Wave Length, UV Uniformity, UV Intensity, Light Guide, LENS Type, Lamp Life time, Lamp House, Dimension, Weight, Control, Power Supply

Semi - UV노광기 & Semi – UV Irradiation 장치

Model, Exposure Area, UV Lamp, Wave Length, Resolution, UV Intensity, UV Uniformity, Collimation Half Angle, Declination Angle, Lamp Life time, Dimension, Weight, Alignment Accuracy, Alignment Method, Mask Contact, Control , Power Supply